ULSI Front-End Technology

The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.

Sample Chapter(s)
Chapter One: Introduction to the History of Semiconductors (411 KB)

• Preface
• Author Biography
• Introduction to the History of Semiconductors
• History of MOS Technology
• CMOS Switching Speed Characterization and An Overview Regarding How to Speed Up CMOS
• Low Power CMOS Engineering
• Analog CMOS Technology
• Index